About: Development of Diamond and Silicon MEMS Sensor Arrays with Integrated Readout for Vapor Detection

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Author	Lissorgues, Gaëlle (19..-....) Scorsone, Emmanuel Rousseau, Lionel (1972-....) Possas Abreu, Maira (1988-....) Descours, Emilie
Bibliographic Citation	Ghassemi Farbod, Rousseau Lionel, Scorsone Emmanuel, Descours Emilie, Lissorgues Gaelle. Development of Diamond and Silicon MEMS Sensor Arrays with Integrated Readout for Vapor Detection. Sensors, 2017, 17 (6), pp.1163. ⟨10.3390/s17061163⟩
Title	Development of Diamond and Silicon MEMS Sensor Arrays with Integrated Readout for Vapor Detection
dc:date	2017
Digital Object Identifier (DOI)	10.3390/s17061163

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