About: Microstructure and mechanical properties of AlN films obtained by plasma enhanced chemical vapor deposition

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Author	Abdallah, Bassam (1976-...) Besland, Marie-Paule (19..-....) Sanchez Mathon, Gustavo (1965-....) Jouan, Pierre-Yves Tixier, Christelle (1969-....) Djouadi, Mohamed-Abdou Tristant, Pascal (1965-....) Bologna Alles, Aldo
Bibliographic Citation	Sanchez Gustavo, Abdallah B., Tristant Pascal, Dublanche-Tixier Christelle, Djouadi M. A., Besland Marie-Paule, Jouan Pierre-Yves, Bologna Alles A.. Microstructure and mechanical properties of AlN films obtained by plasma enhanced chemical vapor deposition. Journal of Materials Science, Springer Verlag, 2009, 44, pp.6125-6134. ⟨10.1007/s10853-009-3847-3⟩
Title	Microstructure and mechanical properties of AlN films obtained by plasma enhanced chemical vapor deposition
dc:date	2009

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