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AttributesValues
Author
Bibliographic Citation
  • Bongrain Alexandre, Scorsone Emmanuel, Rousseau Lionel, Lissorgues Gaelle, Gesset Celine, Saada Samuel, Bergonzo Philippe. Selective nucleation in silicon moulds for diamond MEMS fabrication. Journal of Micromechanics and Microengineering, 2009, 19 (7), ⟨10.1088/0960-1317/19/7/074015⟩
Title
  • Selective nucleation in silicon moulds for diamond MEMS fabrication
dc:date
  • 2009
Digital Object Identifier (DOI)
  • 10.1088/0960-1317/19/7/074015
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