About: Electromechanical transconductance properties of a GaN MEMS resonator with fully integrated HEMT transducers

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About: Electromechanical transconductance properties of a GaN MEMS resonator with fully integrated HEMT transducers Goto Sponge NotDistinct Permalink

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Author	Gaquière, Christophe (1966-...) Théron, Didier (1962-....) Werquin, Matthieu (1977-...) Faucher, Marc (1977-.... ; auteur en physique) Buchaillot, Lionel (1966-....) Cordier, Yvon (19..-....)
Bibliographic Citation	Faucher M., Cordier Y., Werquin M., Buchaillot L., Gaquiere C., Theron D.. Electromechanical transconductance properties of a GaN MEMS resonator with fully integrated HEMT transducers. Journal of Microelectromechanical Systems, Institute of Electrical and Electronics Engineers, 2012, 21, pp.370-378. ⟨10.1109/JMEMS.2011.2179010⟩
Title	Electromechanical transconductance properties of a GaN MEMS resonator with fully integrated HEMT transducers
dc:date	2012

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