About: GaN MEMS resonators : from demonstration to microsystem-compatible performances

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About: GaN MEMS resonators : from demonstration to microsystem-compatible performances Goto Sponge NotDistinct Permalink

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Author	Gaquière, Christophe (1966-...) Théron, Didier (1962-....) Werquin, Matthieu (1977-...) Faucher, Marc (1977-.... ; auteur en physique) Ben Amar, Achraf (1984-....) Vaurette, François (1981-....) Ducatteau, Damien (1968-....) Buchaillot, Lionel (1966-....) Cordier, Yvon (19..-....)
Bibliographic Citation	Faucher M., Ben Amar A., Zhang V., Cordier Y., Werquin M., Brandli V., Grimbert B., Vaurette F., Tilmant P., François M., Boyaval C., Lepilliet S., Ducatteau D., Gaquiere C., Buchaillot L., Theron D.. GaN MEMS resonators : from demonstration to microsystem-compatible performances. 36th Workshop on Compound Semiconductor Devices and Integrated Circuits, WOCSDICE 2012, 2012, Porquerolles, France. pp.1-4
Title	GaN MEMS resonators : from demonstration to microsystem-compatible performances
dc:date	2012

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