About: Integrative technology-based approach of MEMS for biological applications

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Author	Soyer, Caroline (1975-....) Remiens, Denis (1959-....) Ayela, Cédric (1981-....) Haupt, Karsten Nicu, Liviu (1973-....) Mathieu, Fabrice (1972-...) Leïchlé, Thierry (19..-....) Alava, Thomas (1983-....) Saya, Daisuke (19..-....)
Bibliographic Citation	Nicu Liviu, Alava Thomas, Leichle Thierry, Saya Daisuke, Pourciel Jean Bernard, MATHIEU Fabrice, Soyer Caroline, Remiens Denis, Ayela Cédric, Haupt Karsten. Integrative technology-based approach of MEMS for biological applications. IEEE International Solid-State Circuits Conference, 2010, San Francisco, United States. 12 p
Title	Integrative technology-based approach of MEMS for biological applications
dc:date	2010

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