About: Localized Silicon Nanocrystals Fabricated by Stencil Masked Low Energy Ion Implantation: Effect of the Stencil Aperture Size on the Implanted Dose   Goto Sponge  NotDistinct  Permalink

An Entity of Type : owl:Thing, within Data Space : data.idref.fr associated with source document(s)

AttributesValues
Author
Bibliographic Citation
  • Diaz Régis, Dumas Carine, Grisolia Jérémie, Ondarçuhu Thierry, Schamm-Chardon Sylvie, Arbouet Arnaud, Paillard Vincent, BenAssayag Gérard, Normand Pascal, Brugger Juergen. Localized Silicon Nanocrystals Fabricated by Stencil Masked Low Energy Ion Implantation: Effect of the Stencil Aperture Size on the Implanted Dose. Symposium H – Materials and Physics for Nonvolatile Memories) , 2009, indéterminée, Unknown Region. pp.61-66, ⟨10.1557/PROC-1160-H04-05⟩
  • Diaz Régis, Dumas Carine, Grisolia Jérémie, Ondarçuhu Thierry, Schamm-Chardon Sylvie, Arbouet Arnaud, Paillard Vincent, Benassayag Gérard, Normand Pascal, Brugger Juergen. Localized Silicon Nanocrystals Fabricated by Stencil Masked Low Energy Ion Implantation: Effect of the Stencil Aperture Size on the Implanted Dose. Symposium H – Materials and Physics for Nonvolatile Memories) , 2009, indéterminée, Unknown Region. pp.61-66, ⟨10.1557/PROC-1160-H04-05⟩
Title
  • Localized Silicon Nanocrystals Fabricated by Stencil Masked Low Energy Ion Implantation: Effect of the Stencil Aperture Size on the Implanted Dose
dc:date
  • 2009
Digital Object Identifier (DOI)
  • 10.1557/PROC-1160-H04-05
Faceted Search & Find service v1.13.91 as of Aug 16 2018


Alternative Linked Data Documents: ODE     Content Formats:       RDF       ODATA       Microdata      About   
This material is Open Knowledge   W3C Semantic Web Technology [RDF Data]
OpenLink Virtuoso version 07.20.3229 as of May 14 2019, on Linux (x86_64-pc-linux-gnu), Single-Server Edition (70 GB total memory)
Data on this page belongs to its respective rights holders.
Virtuoso Faceted Browser Copyright © 2009-2025 OpenLink Software