About: Non-contact XUV metrology of Ru/B 4 C multilayer optics by means of Hartmann wavefront analysis   Goto Sponge  NotDistinct  Permalink

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AttributesValues
Author
Bibliographic Citation
  • Ruiz-Lopez Mabel, Dacasa Hugo, Mahieu Benoît, Lozano Magali, Li Lu, Zeitoun Philippe, Bleiner Davide. Non-contact XUV metrology of Ru/B 4 C multilayer optics by means of Hartmann wavefront analysis. Applied optics, 2018, 57 (6), ⟨10.1364/AO.57.001315⟩
Title
  • Non-contact XUV metrology of Ru/B 4 C multilayer optics by means of Hartmann wavefront analysis
dc:date
  • 2018
Digital Object Identifier (DOI)
  • 10.1364/AO.57.001315
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