About: Fabrication and micromechanical characterization of polycrystalline diamond microcantilevers

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Author	Lissorgues, Gaëlle (19..-....) Scorsone, Emmanuel Rousseau, Lionel (1972-....) Bergonzo, Philippe (1967-...) Possas Abreu, Maira (1988-....)
Bibliographic Citation	Possas Maira, Rousseau Lionel, Ghassemi Farbod, Lissorgues Gaelle, Scorsone Emmanuel, Bergonzo Philippe. Fabrication and micromechanical characterization of polycrystalline diamond microcantilevers. 2014 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), Apr 2014, Cannes, France. ⟨10.1109/DTIP.2014.7056658⟩
Title	Fabrication and micromechanical characterization of polycrystalline diamond microcantilevers
dc:date	2014
Digital Object Identifier (DOI)	10.1109/DTIP.2014.7056658

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