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Bibliographic Citation
  • Falgayrettes P., Gall-Borrut P., Tsigara A., Belier B., Maillard F.. MOEMS for near field optical microscopy: from conception to fabrication process challenges. DTIP, Design, Test, Integration and Packaging of MEMS/MOEMS, 2015, Montpellier, France
  • 2015
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