About: In situ monitoring of stress change in GeTe thin films during thermal annealing and crystallization

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About: In situ monitoring of stress change in GeTe thin films during thermal annealing and crystallization Goto Sponge NotDistinct Permalink

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Author	Escoubas, Stéphanie (197.-....) Mocuta, Cristian (19..-.... ; auteur(e) en physique) Richard, Marie-Ingrid (1981-.... ; auteure en physique) Noé, Pierre (1978-.... ; ingénieur) Burle-Durbec, Nelly (1958-....) Chahine, Rebecca (1993-....) Putero, Magali (19..-....) Gallard, Manon (1992-....)
Bibliographic Citation	Burle N., Escoubas S., Guichet C., Putero Magali, Mocuta C., Richard M.-I., Bernard M., Noé P., Thomas O.. In situ monitoring of stress change in GeTe thin films during thermal annealing and crystallization. Micro and Nano Engineering, Elsevier, 2018, ⟨10.1016/j.mne.2018.10.001⟩ Yahia B. Ben, Amara M.S., Gallard M., Burle N., Escoubas S., Guichet C., Putero Magali, Mocuta C., Richard M.-I., Chahine R., Sabbione C., Bernard M., Fellouh L., Noé P., Thomas O.. In situ monitoring of stress change in GeTe thin films during thermal annealing and crystallization. Micro and Nano Engineering, 2018, ⟨10.1016/j.mne.2018.10.001⟩
Title	In situ monitoring of stress change in GeTe thin films during thermal annealing and crystallization
dc:date	2018
Digital Object Identifier (DOI)	10.1016/j.mne.2018.10.001

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