About: Integration by shadow mask process of ZnO:Ga sputtered layers onto microsensor platform for detection of sub-ppm acetaldehyde concentration

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About: Integration by shadow mask process of ZnO:Ga sputtered layers onto microsensor platform for detection of sub-ppm acetaldehyde concentration Goto Sponge NotDistinct Permalink

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Author	Chapelle, Audrey (1985-.... ; docteur en sciences des matériaux) Tailhades, Philippe (1960-....) Talhi, Chabane (19..-.... ; architecture de systèmes en informatique) Barnabe, Antoine (19..-....) Presmanes, Lionel (19..-....) Thimont, Yohann (1981-...) Ménini, Philippe (19..-....)
Bibliographic Citation	Presmanes Lionel, Thimont Y., Chapelle Audrey, Blanc Frédéric, Talhi Chabane, Bonningue C, Barnabé A, Menini Philippe, Tailhades Ph. Integration by shadow mask process of ZnO:Ga sputtered layers onto microsensor platform for detection of sub-ppm acetaldehyde concentration. EUROSENSORS 2017, Sep 2017, Paris, France
Title	Integration by shadow mask process of ZnO:Ga sputtered layers onto microsensor platform for detection of sub-ppm acetaldehyde concentration
dc:date	2017

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