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  • Khomenkova L., Chauvat M.-P., Marie P., Frilay C., Lemarie F., Boudin S., Portier X., Ratel-ramond N., Labbe Christophe, Cardin J., Gourbilleau F.. Thermally induced evolution of optical and structural properties of Er2O3 films grown on Si substrates by thermal atomic layer deposition. Materials Letters, Elsevier, 2019, pp.127216. ⟨10.1016/j.matlet.2019.127216⟩
  • Khomenkova L., Chauvat M.-P., Marie P., Frilay C., Lemarie F., Boudin S., Portier X., Ratel-Ramond Nicolas, Labbe Christophe, Cardin J., Gourbilleau F.. Thermally induced evolution of optical and structural properties of Er2O3 films grown on Si substrates by thermal atomic layer deposition. Materials Letters, Elsevier, 2019, pp.127216. ⟨10.1016/j.matlet.2019.127216⟩
  • Khomenkova L., Chauvat M.-P., Marie P., Frilay C., Lemarié Franck, Boudin S., Portier X., Ratel-Ramond Nicolas, Labbe Christophe, Cardin J., Gourbilleau F.. Thermally induced evolution of optical and structural properties of Er2O3 films grown on Si substrates by thermal atomic layer deposition. Materials Letters, Elsevier, 2020, 263, pp.127216. ⟨10.1016/j.matlet.2019.127216⟩
Title
  • Thermally induced evolution of optical and structural properties of Er2O3 films grown on Si substrates by thermal atomic layer deposition
dc:date
  • 2019
  • 2020
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