Bibliographic Citation
| - Dezest Denis, MATHIEU Fabrice, Mazenq Laurent, Soyer Caroline, Costecalde Jean, Remiens Denis, Thomas Olivier, Deü Jean-François, Nicu Liviu. Wafer-scale integration of piezoelectric actuation capabilities in nanoelectromechanical systems resonators. 2013 Nanomechanical Sensing Workshop, May 2013, Stanford, USA, United States. pp.0
- Dezest Denis, Mathieu Fabrice, Mazenq Laurent, Soyer Caroline, Costecalde Jean, Remiens Denis, Thomas Olivier, Deü Jean-François, Nicu Liviu . Wafer-scale integration of piezoelectric actuation capabilities in nanoelectromechanical systems resonators . 2013 Nanomechanical Sensing Workshop, May 2013, Stanford, USA, United States . pp.0
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