AttributesValues
Author
Bibliographic Citation
  • Salou P., Lebius Henning, Benyagoub A., Langlinay T., Lelièvre D., Ban-d’Etat B.. An innovative experimental setup for the measurement of sputtering yield induced by keV energy ions. Review of Scientific Instruments, American Institute of Physics, 2013, 84 (9), pp.095115. ⟨10.1063/1.4821973⟩
Title
  • An innovative experimental setup for the measurement of sputtering yield induced by keV energy ions
dc:date
  • 2013
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