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  • Xu Hao, Venkatachalam Srisaran, Boyaval Christophe, Tilmant Pascal, Vaurette Francois, Deblock Yves, Theron Didier, Zhou Xin . Fabrication of silicon nitride membrane nanoelectromechanical resonator . Microelectronic Engineering, 2023, 280, pp.112064 . ⟨10.1016/j.mee.2023.112064⟩
  • Xu Hao, Venkatachalam Srisaran, Boyaval Christophe, Tilmant Pascal, Vaurette Francois, Deblock Yves, Theron Didier, Zhou Xin. Fabrication of silicon nitride membrane nanoelectromechanical resonator. Microelectronic Engineering, 2023, 280, pp.112064. ⟨10.1016/j.mee.2023.112064⟩
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  • Fabrication of silicon nitride membrane nanoelectromechanical resonator
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  • 2023
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