About: Monitoring Tantalum nitride thin films structure by reactive HiPIMS magnetron sputtering : from microstructure to properties   Goto Sponge  NotDistinct  Permalink

An Entity of Type : owl:Thing, within Data Space : data.idref.fr associated with source document(s)

AttributesValues
Author
Bibliographic Citation
  • Achille Aurélie, Poulon-Quintin Angeline, Michau Dominique, Fourcade Sébastien, Jouannigot Stéphane, Ibalot A., Mauvy Fabrice, Cavarroc Marjorie. Monitoring Tantalum nitride thin films structure by reactive HiPIMS magnetron sputtering : from microstructure to properties. Plathinium 2021 - Plasma Thin Film International Union Meeting, Sep 2021, Visioconférence, France
Title
  • Monitoring Tantalum nitride thin films structure by reactive HiPIMS magnetron sputtering : from microstructure to properties
dc:date
  • 2021
Faceted Search & Find service v1.13.91 as of Aug 16 2018


Alternative Linked Data Documents: ODE     Content Formats:       RDF       ODATA       Microdata      About   
This material is Open Knowledge   W3C Semantic Web Technology [RDF Data]
OpenLink Virtuoso version 07.20.3229 as of May 14 2019, on Linux (x86_64-pc-linux-gnu), Single-Server Edition (70 GB total memory)
Data on this page belongs to its respective rights holders.
Virtuoso Faceted Browser Copyright © 2009-2024 OpenLink Software