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dcterms:bibliographicCitation
Chabli Amal, Cherns Peter, Nicolas Chevalier, Cooper David, Dominique Lafond, Bertin François, BLANC Henri, Brenac A., Andreucci Philippe, GABRIEL Jean Christophe. Characterization of Integrated Nano Materials. 2009 International Conference on Frontiers of Characterization and Metrology for Nanoelectronics, May 2009, Albany, New York, United States. pp.12-20, ⟨10.1063/1.3251207⟩
dcterms:title
Characterization of Integrated Nano Materials
dc:date
2009