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dcterms:bibliographicCitation
Ayela Cédric, Alava Thomas, Lagrange Denis, Remiens Denis, Soyer Caroline, Ondarçuhu Thierry, Greve A., Nicu Liviu. Electronic scheme for multiplexed dynamic behavior excitation and detection of piezoelectric silicon-based micromembranes. IEEE Sensors Journal, Institute of Electrical and Electronics Engineers, 2008, 8, pp.210-217. ⟨10.1109/JSEN.2007.913021⟩
dc:date
2008