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dcterms:bibliographicCitation
Ruiz-Lopez Mabel, Dacasa Hugo, Mahieu Benoît, Lozano Magali, Li Lu, Zeitoun Philippe, Bleiner Davide. Non-contact XUV metrology of Ru/B 4 C multilayer optics by means of Hartmann wavefront analysis. Applied optics, 2018, 57 (6), ⟨10.1364/AO.57.001315⟩
dcterms:title
Non-contact XUV metrology of Ru/B 4 C multilayer optics by means of Hartmann wavefront analysis
dc:date
2018
bibo:doi
10.1364/AO.57.001315