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dcterms:bibliographicCitation
Presmanes Lionel, Thimont Y., Chapelle Audrey, Blanc Frédéric, Talhi Chabane, Bonningue C, Barnabé A, Menini Philippe, Tailhades Ph. Integration by shadow mask process of ZnO:Ga sputtered layers onto microsensor platform for detection of sub-ppm acetaldehyde concentration. EUROSENSORS 2017, Sep 2017, Paris, France
dcterms:title
Integration by shadow mask process of ZnO:Ga sputtered layers onto microsensor platform for detection of sub-ppm acetaldehyde concentration
dc:date
2017