http://data.idref.fr:8890/sparql?query=define%20sql%3Adescribe-mode%20%22CBD%22%20%20DESCRIBE%20%3Chttps%3A%2F%2Fhal.archives-ouvertes.fr%2Fhal-01148239%23id%3E&output=application%2Fatom%2Bxml2024-03-29T00:15:13.843778ZOData Service and Descriptor Documenthttps://hal.archives-ouvertes.fr/hal-01148239#id2024-03-29T00:15:13.843778Z2009Rahmoun K., Iost A., Keryvin V., Guillemot G., Sari N. E. Chabane. A multilayer model for describing hardness variations of aged porous silicon low-dielectric-constant thin films. Thin Solid Films, Elsevier, 2009, 518 (1), pp.213--221. ⟨10.1016/j.tsf.2009.07.040⟩