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dcterms:bibliographicCitation
Rahmoun K., Iost A., Keryvin V., Guillemot G., Sari N. E. Chabane. A multilayer model for describing hardness variations of aged porous silicon low-dielectric-constant thin films. Thin Solid Films, Elsevier, 2009, 518 (1), pp.213--221. ⟨10.1016/j.tsf.2009.07.040⟩
dc:date
2009