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dcterms:bibliographicCitation
Pagazani Julien, Nicole Pierre, Rousseau Lionel, Marty Frédéric, Lissorgues Gaelle. A new design for rotational, tunable wideband RF MEMS capacitors. Microsystem Technologies, 2011, 17 (4), pp.513-522. ⟨10.1007/s00542-011-1226-x⟩
dcterms:title
A new design for rotational, tunable wideband RF MEMS capacitors
dc:date
2011
bibo:doi
10.1007/s00542-011-1226-x